Complex Refractive Index Extraction for Ultrathin Molybdenum Oxides Using Micro‐Photonic Integrated Circuit Chips
نویسندگان
چکیده
The emerging 2D nanomaterials with unique optical properties are promising for next-generation miniatured on-chip devices. One of the prerequisites is to precisely measure their parameters during implementation. However, inherent features layers, including limited lateral dimensions and ultra-small thicknesses, not favorable conventional characterization techniques applied in bulk system, especially complex refractive indices measurement. Here, this work proposes a silicon photonics-enabled platform evaluate ultrathin materials facile reliable manner. Ultrathin molybdenum oxides (MoOx) multiple stoichiometric states selected as target material provide sufficient complexity system investigation. Upon integration MoOx, photonic chip, form Mach-Zehnder interferometer, exhibits wavelength shifts which used calculating indices. Compared theoretical calculation, deviation low 1% generally less than 5%. This demonstrates highly accurate approach measuring index films, possibly assisting future advances materials-enabled applications.
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ژورنال
عنوان ژورنال: Advanced Optical Materials
سال: 2023
ISSN: ['2195-1071']
DOI: https://doi.org/10.1002/adom.202300340